Publication:

Laboratory-based 3D X-ray standing-wave analysis of nanometre-scale gratings

Date

2024
Journal article
https://doi.org/10.1107/S1600576724007179
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dc.contributor.authorMatveevskii, Ksenia
dc.contributor.authorNikolaev, Konstantin V.
dc.contributor.authorFallica, Roberto
dc.contributor.authorBeckers, Detlef
dc.contributor.authorGateshki, Milen
dc.contributor.authorKharchenko, Alexander
dc.contributor.authorSpanjer, Bart
dc.contributor.authorRogachev, Alexander
dc.contributor.authorYakunin, Sergey
dc.contributor.authorAckermann, Marcelo
dc.contributor.authorMakhotkin, Igor A.
dc.contributor.imecauthorFallica, Roberto
dc.contributor.orcidimecFallica, Roberto::0000-0003-4523-9624
dc.date.accessioned2025-06-04T09:40:50Z
dc.date.available2024-11-24T16:40:04Z
dc.date.available2025-06-04T09:40:50Z
dc.date.embargo2024-07-19
dc.date.issued2024
dc.description.wosFundingTextNEXT3D project funded by TKI Connecting Industry call with the support of Malvern Panalytical; Industrial Partnership Program X-tools funded by the Netherlands Organization for Scientific Research, ASML, Carl Zeiss SMT and Malvern Panalytical (grant No. 741.018.301).
dc.identifier.doi10.1107/S1600576724007179
dc.identifier.issn1600-5767
dc.identifier.pmidMEDLINE:39387070
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/44829
dc.publisherINT UNION CRYSTALLOGRAPHY
dc.source.beginpage1288
dc.source.endpage1298
dc.source.issue5
dc.source.journalJOURNAL OF APPLIED CRYSTALLOGRAPHY
dc.source.numberofpages11
dc.source.volume57
dc.subject.keywordsFLUORESCENCE
dc.subject.keywordsNANOSTRUCTURES
dc.title

Laboratory-based 3D X-ray standing-wave analysis of nanometre-scale gratings

dc.typeJournal article
dspace.entity.typePublication
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