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Browsing by Author "Yamagishi, Hajime"

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    Electrical evaluation and TEM/SEm investigation of a bottomless I-PVD Ta(N) barrier in a damascene architecture

    Yamagishi, Hajime
    ;
    Tokei, Zsolt  
    ;
    Beyer, Gerald  
    ;
    Donaton, R. A.
    ;
    Bender, Hugo  
    ;
    Nogami, T.
    Oral presentation
    2000, Advanced Metallization Conference; October 2000; San Diego, CA, USA.

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