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Browsing by Author "Yamaguchi, Atusko"

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    Variability study with CD-SEM metrology for STT-MRAM: Correlation analysis between physical dimensions and electrical property of the memory element

    Ohashi, Takeyoshi
    ;
    Yamaguchi, Atusko
    ;
    Hasumi, Kazuhisa
    ;
    Inoue, Osamu
    ;
    Ikata, Masami
    Meeting abstract
    2017, Metrology, Inspection, and Process Control for Microlithography XXXI, 27/02/2017, p.101450H

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