Browsing by Author "Yamaguchi, Atusko"
Now showing 1 - 1 of 1
- Results per page
- Sort Options
Publication Variability study with CD-SEM metrology for STT-MRAM: Correlation analysis between physical dimensions and electrical property of the memory element
;Ohashi, Takeyoshi ;Yamaguchi, Atusko ;Hasumi, Kazuhisa ;Inoue, OsamuIkata, MasamiMeeting abstract2017, Metrology, Inspection, and Process Control for Microlithography XXXI, 27/02/2017, p.101450H