Browsing by Author "Yamaguchi, T."
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Publication A Novel Volatile Film for Dielectric Plasma Damage Protection
Meeting abstract2019, Plasma Etch and Strip in Microtechnology Workshop - PESM, 20/05/2019Publication Gas phase pore stuffing for the protection of organo-silicate glass dielectric materials
Proceedings paper2018, 2018 International Symposium on Semiconductor Manufacturing - ISSM, 10/12/2018, p.1-3Publication Gas-phase pore stuffing for low-damage patterning of organo-silicate glass dielectric materials
Meeting abstract2018, AVS 65th Meeting & Exhibition 2018, 21/10/2018, p.PSM-WeA9