Browsing by Author "Yamaguchi, Tatsuya"

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Novel volatile film for the protection of organo-silicate glass dielectric materials

Fujikawa, Makoto
;
Yamaguchi, Tatsuya
;
Nozawa, S.
;
Kikuchi, Y.
;
Maekawa, Kaoru
;
Kawasaki, H.
Journal article
2019, IEEE Transactions on Semiconductor Manufacturing, (32) 4, p.438-443
Use of a thermally degradable chemical vapor deposited polymer film for low damage plasma processing of highly porous dielectrics

de Marneffe, Jean-Francois
;
Yamaguchi, Tatsuya
;
Fujikawa, Makoto
;
Rezvanov, Askar
Journal article
2019, ACS Applied Electronic Materials, (1) 12, p.2602-2611