Repository logo Institutional repository
  • Communities & Collections
  • Scientific publicationsOpen knowledge
Search repository
High contrast
  1. Home
  2. Browse by Author

Browsing by Author "Yamaguchi, Yoko Yamaguchi"

Filter results by typing the first few letters
Now showing 1 - 1 of 1
  • Results per page
  • Sort Options
  • Loading...
    Thumbnail Image
    Publication

    Dry-etch fin patterning of a sub-22nm node SRAM cell: EUV lithography new dry etch challenges

    Altamirano Sanchez, Efrain  
    ;
    Yamaguchi, Yoko Yamaguchi
    ;
    Lindain, Jeffrey Lindain
    Proceedings paper
    2011, China Semiconductor Technology International Conference - CSTIC, 12/03/2011, p.377-382

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings