Browsing by Author "Yamamoto, Hiroki"
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Publication Role of metal sensitizers for sensitivity improvement in EUV chemically amplified resist
Journal article2019-01, Journal of Photopolymer Science and Technology, (31) 6, p.747-751Publication Sensitizers in EUV chemically amplified resist: mechanism of sensitivity improvement
Proceedings paper2018, Extreme Ultraviolet (EUV) Lithography IX, 25/02/2018, p.1058307Publication Sensitizers in extreme ultraviolet chemically amplified resists: mechanism of sensitivity improvement
Journal article2019-12, Journal of Micro/Nanolithography MEMS and MOEMS, (17) 4, p.43506