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Browsing by Author "Yamaszaki, Y."

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    Better prediction on patterning failure mode with hotspot aware OPC modeling

    Wei, Chih-I
    ;
    Wu, Stewart  
    ;
    Deng, Yunfei
    ;
    Khaira, Gurdaman
    ;
    Kusnadi, I.
    ;
    Fenger, G.
    ;
    Kang, S.
    Proceedings paper
    2021, Metrology, Inspection, and Process Control for Microlithography XXXIV, 22/02/2021, p.1161112

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