Browsing by Author "Yan, Pei-Yang"

Now showing 1 - 3 of 3

Impact of EUV mask surface roughness on LER

Vaglio Pret, Alessandro
;
Gronheid, Roel
;
Younkin, Todd
;
Leeson, Michael
;
Yan, Pei-Yang
Oral presentation
2012, ASML TC
Impact of EUV mask surface roughness on LER

Vaglio Pret, Alessandro
;
Gronheid, Roel
;
Younkin, Todd
;
Leeson, Michael J.
;
Yan, Pei-Yang
Proceedings paper
2012, Extreme Ultraviolet (EUV) Lithography III, 12/02/2012, p.83220N
Mask effects on resist variability in extreme ultraviolet lithography

Vaglio Pret, Alessandro
;
Gronheid, Roel
;
Engelen, Jan
;
Yan, Pei-Yang
;
Leeson, Michael
Journal article
2013, Japanese Journal of Applied Physics, (52) 6, p.03GC02