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Browsing by Author "Yang, E."

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    High k dielectric materials prepared by atomic layer CVD

    Heyns, Marc  
    ;
    Bender, Hugo  
    ;
    Carter, Richard
    ;
    Caymax, Matty  
    ;
    Conard, Thierry  
    ;
    De Gendt, Stefan  
    Oral presentation
    2001, 12th INFOS Conference - Insulating Films on Semiconductors; June 2001; Udine, Italy.

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