Publication:

High k dielectric materials prepared by atomic layer CVD

Date

2001
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Author(s)

Heyns, Marc  
;
Bender, Hugo  
;
Carter, Richard
;
Caymax, Matty  
;
Conard, Thierry  
;
De Gendt, Stefan  
;
Degraeve, Robin  
;
De Witte, Hilde
;
Groeseneken, Guido  
;
Haukka, S.
;
Henson, Kirklen
;
Houssa, Michel  
;
Kubicek, Stefan  
;
Maes, Guido
;
Naili, Mohamed
;
Nohira, Hiroshi
;
Tsai, Wilman
;
Tuominen, Marko
;
Vandervorst, Wilfried  
;
Wilhelm, Rudi
;
Yang, E.
;
Zhao, Chao

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2049 since deposited on 2021-10-14
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Acq. date: 2026-05-16

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