Browsing by Author "Yang, Hongcheon"
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Publication Enabling metrology and inspection for CFET structures using hybrid qualification approaches
Proceedings paper2026, Metrology, Inspection, and Process Control XL, 2026-02-26, p.1398109Publication Nanometer-scale SiGe lateral recess metrology in CFET structures using micro-spot X-ray fluorescence
Proceedings paper2026, Metrology, Inspection, and Process Control XL, 2026-02-22, p.139810ZPublication Optimization toward Non-Zero Offset Stability in Overlay Control: Trends and Prospects
Proceedings paper2025, 2025 Conference on Metrology Inspection and Process Control-Annual, 2025-02-24, p.134260I-1-134260I-7