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Browsing by Author "Yang, Jialing"

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    Exploring the use of Tungsten-based Hard Masks in BEOL interconnects for 3nm node and beyond

    Montero Alvarez, Daniel  
    ;
    Vega Gonzalez, Victor  
    ;
    Puliyalil, Harinarayanan  
    ;
    Nie, Jiuyuan
    Oral presentation
    2022-11-10, AVS 68th International Symposium and Exhibition

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