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Browsing by Author "Yao, Teruyoshi"

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    Joint optimization of layout and litho for SRAM and Logic towards the 20 nm node, using 193i

    De Bisschop, Peter  
    ;
    Laenens, Bart
    ;
    Iwase, Kazuya
    ;
    Yao, Teruyoshi
    ;
    Dusa, Mircea  
    ;
    Smayling, M.
    Proceedings paper
    2011, Optical Microlithography XXIV, 27/02/2011, p.79730B

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