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Joint optimization of layout and litho for SRAM and Logic towards the 20 nm node, using 193i
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1966 since deposited on 2021-10-19
1last month
Acq. date: 2025-12-11
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Metrics
Views
1966 since deposited on 2021-10-19
1last month
Acq. date: 2025-12-11
Citations