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Browsing by Author "Yasui, Kenichi"

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    Inverse lithography for 45-nm-node contact holes at 1.35 numerical aperture

    Kempsell, Monica
    ;
    Hendrickx, Eric  
    ;
    Tritchkov, Alexander
    ;
    Sakajiri, Kyohei
    ;
    Yasui, Kenichi
    Journal article
    2009, Journal of Micro/Nanolithography, MEMS, and MOEMS, (8) 4, p.43001

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