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Browsing by Author "Yeap, Geoffrey"

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    Publication

    CVD based selective Co deposition on Cu and W for via pre-fill

    Chen, Phil
    ;
    Zheng, Jun-Fei
    ;
    Lieten, Ruben  
    ;
    Frye, Asa
    ;
    Baum, Thomas
    ;
    O'Neill, James
    Meeting abstract
    2016, 25th Materials for Advanced Metalization Conference - MAM, 21/03/2016, p.PMT-12

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