Publication:

CVD based selective Co deposition on Cu and W for via pre-fill

Date

2016
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Author(s)

Chen, Phil
;
Zheng, Jun-Fei
;
Lieten, Ruben  
;
Frye, Asa
;
Baum, Thomas
;
O'Neill, James
;
van der Veen, Marleen  
;
Murdoch, Gayle  
;
Boemmels, Juergen  
;
Tokei, Zsolt  
;
Xu, Jeff
;
Zhu, John
;
Bao, Jerry
;
Badaroglu, Mustafa  
;
Yeap, Geoffrey

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Abstract

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