Publication:

CVD based selective Co deposition on Cu and W for via pre-fill

Date

2016
Meeting abstract
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dc.contributor.authorChen, Phil
dc.contributor.authorZheng, Jun-Fei
dc.contributor.authorLieten, Ruben
dc.contributor.authorFrye, Asa
dc.contributor.authorBaum, Thomas
dc.contributor.authorO'Neill, James
dc.contributor.authorvan der Veen, Marleen
dc.contributor.authorMurdoch, Gayle
dc.contributor.authorBoemmels, Juergen
dc.contributor.authorTokei, Zsolt
dc.contributor.authorXu, Jeff
dc.contributor.authorZhu, John
dc.contributor.authorBao, Jerry
dc.contributor.authorBadaroglu, Mustafa
dc.contributor.authorYeap, Geoffrey
dc.contributor.imecauthorLieten, Ruben
dc.contributor.imecauthorvan der Veen, Marleen
dc.contributor.imecauthorMurdoch, Gayle
dc.contributor.imecauthorBoemmels, Juergen
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorBadaroglu, Mustafa
dc.contributor.orcidimecvan der Veen, Marleen::0000-0002-9402-8922
dc.date.accessioned2021-10-23T10:16:16Z
dc.date.available2021-10-23T10:16:16Z
dc.date.embargo9999-12-31
dc.date.issued2016
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/26432
dc.source.beginpagePMT-12
dc.source.conference25th Materials for Advanced Metalization Conference - MAM
dc.source.conferencedate21/03/2016
dc.source.conferencelocationBrussel Belgium
dc.title

CVD based selective Co deposition on Cu and W for via pre-fill

dc.typeMeeting abstract
dspace.entity.typePublication
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