Browsing by Author "Yim, J-H."
Now showing 1 - 1 of 1
- Results Per Page
- Sort Options
Publication Ellipsometric porosimetry of porous low-k films with quazi-closed cavities
;Baklanov, Mikhaïl ;Mogilnikov, K.P.Yim, J-H.Proceedings paper2004, Materials, Technology and Reliability for Advanced Interconnects and Low-k Dielectrics, 12/04/2004, p.55-60