Publication:
Ellipsometric porosimetry of porous low-k films with quazi-closed cavities
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1826 since deposited on 2021-10-15
1last week
Acq. date: 2026-07-14
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Statistics
Views
1826 since deposited on 2021-10-15
1last week
Acq. date: 2026-07-14
Citations