Publication:
Ellipsometric porosimetry of porous low-k films with quazi-closed cavities
Date
| dc.contributor.author | Baklanov, Mikhaïl | |
| dc.contributor.author | Mogilnikov, K.P. | |
| dc.contributor.author | Yim, J-H. | |
| dc.date.accessioned | 2021-10-15T12:40:32Z | |
| dc.date.available | 2021-10-15T12:40:32Z | |
| dc.date.issued | 2004 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/8527 | |
| dc.source.beginpage | 55 | |
| dc.source.conference | Materials, Technology and Reliability for Advanced Interconnects and Low-k Dielectrics | |
| dc.source.conferencedate | 12/04/2004 | |
| dc.source.conferencelocation | San Francisco, CA USA | |
| dc.source.endpage | 60 | |
| dc.title | Ellipsometric porosimetry of porous low-k films with quazi-closed cavities | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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