Browsing by Author "Yin, Xiaogen"
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Publication Comparative study on NBTI kinetics in Si p-FinFETs with B2H6-based and SiH4-based atomic layer deposition tungsten (ALD W) filling metal
;Zhou, Longda ;Wang, Guilei ;Yin, Xiaogen ;Ji, Zhigang ;Liu, Qianqian ;Xu, HaoYang, HongJournal article2020, MICROELECTRONICS RELIABILITY, 107