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Browsing by Author "Yin, Xiaogen"

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    Comparative study on NBTI kinetics in Si p-FinFETs with B2H6-based and SiH4-based atomic layer deposition tungsten (ALD W) filling metal

    Zhou, Longda
    ;
    Wang, Guilei
    ;
    Yin, Xiaogen
    ;
    Ji, Zhigang
    ;
    Liu, Qianqian
    ;
    Xu, Hao
    ;
    Yang, Hong
    Journal article
    2020, MICROELECTRONICS RELIABILITY, 107

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