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Comparative study on NBTI kinetics in Si p-FinFETs with B2H6-based and SiH4-based atomic layer deposition tungsten (ALD W) filling metal
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1878 since deposited on 2021-11-02
Acq. date: 2025-10-24
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Views
1878 since deposited on 2021-11-02
Acq. date: 2025-10-24
Citations