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Browsing by Author "Ynzunza, Ramon"

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    High sensitivity repeater detection with broadband plasma optical wafer inspection for mask defect qualification

    Cross, Andrew
    ;
    Sah, Kaushik
    ;
    Anantha, Vidyasagar
    ;
    Gupta, Balarka
    ;
    Ynzunza, Ramon
    ;
    Troy, Neil
    Proceedings paper
    2020, Conference on Extreme Ultraviolet Lithography, SEP 21-25, 2020, p.11517OU

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