High sensitivity repeater detection with broadband plasma optical wafer inspection for mask defect qualification

Author(s)

Cross, Andrew

;

Sah, Kaushik

;

Anantha, Vidyasagar

;

Gupta, Balarka

;

Ynzunza, Ramon

;

Troy, Neil

;

Wu, Kenong

;

Babulnath, Raghav

;

Rajendran, Meghna

;

Van den Heuvel, Dieter

;

Proceedings of SPIE

1758 since deposited on 2021-11-02

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Acq. date: 2025-10-25