Browsing by Author "Yoo, Yong Min"
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Publication Relationships between deposition parameters, step coverage, throughput, and electrical properties of PEALD SiO2 insulation liners for HVM TSV application
;Jung, In Soo ;Woo, Jeong-Jun ;Kwon, Hak Yong ;Kim, Young-Jae ;Kang, Dong-SukPark, Ju-HyukMeeting abstract2011, 11th International Conference on Atomic Layer Deposition - ALD, 26/06/2011