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Browsing by Author "Yoon, Tae-Ho"

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    Publication

    Low temperature plasma-enhanced ALD enables cost-effective spacer defined double patterning (SDDP)

    Beynet, Julien
    ;
    Wong, Patrick  
    ;
    Miller, Andy  
    ;
    Locorotondo, Sabrina  
    ;
    Vangoidsenhoven, Diziana  
    Proceedings paper
    2009, SPIE Lithography Asia Taiwan, 18/11/2009, p.75201J

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