Browsing by Author "Yoshida, Y."
Now showing 1 - 2 of 2
- Results Per Page
- Sort Options
Publication Selective wet etching in fabricating SiGe and Ge nanowires for gate-all-around MOSFETs
Proceedings paper2018, Ultra Clean Processing of Semiconductor Surfaces XIV - UCPSS, 3/09/2018, p.101-106Publication Surface preparation and wet cleaning for germanium surface
Proceedings paper2017, Surface Preparation and Cleaning Conference - SPCC, 28/03/2017, p.170-180