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    Properties of mesoporous low-k MSSQ based film prepared using macromolecular porogen

    Baklanov, Mikhaïl
    ;
    Jehoul, Christiane  
    ;
    Flannery, C. M.
    ;
    Moguilnikov, Konstantin
    ;
    Gore, R.
    Proceedings paper
    2002, Advanced Metallization Conference 2001, 9/10/2001, p.273-278

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