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Properties of mesoporous low-k MSSQ based film prepared using macromolecular porogen
Publication:
Properties of mesoporous low-k MSSQ based film prepared using macromolecular porogen
Date
2002
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Baklanov, Mikhaïl
;
Jehoul, Christiane
;
Flannery, C. M.
;
Moguilnikov, Konstantin
;
Gore, R.
;
Gronbeck, D.
;
Prokopowicz, G.
;
Sullivan, C.
;
You, Y.
;
Pugliano, N.
;
Gallagher, M.
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1978
since deposited on 2021-10-14
Acq. date: 2025-10-24
Citations
Metrics
Views
1978
since deposited on 2021-10-14
Acq. date: 2025-10-24
Citations