Publication:
Properties of mesoporous low-k MSSQ based film prepared using macromolecular porogen
Date
| dc.contributor.author | Baklanov, Mikhaïl | |
| dc.contributor.author | Jehoul, Christiane | |
| dc.contributor.author | Flannery, C. M. | |
| dc.contributor.author | Moguilnikov, Konstantin | |
| dc.contributor.author | Gore, R. | |
| dc.contributor.author | Gronbeck, D. | |
| dc.contributor.author | Prokopowicz, G. | |
| dc.contributor.author | Sullivan, C. | |
| dc.contributor.author | You, Y. | |
| dc.contributor.author | Pugliano, N. | |
| dc.contributor.author | Gallagher, M. | |
| dc.contributor.imecauthor | Jehoul, Christiane | |
| dc.date.accessioned | 2021-10-14T21:07:54Z | |
| dc.date.available | 2021-10-14T21:07:54Z | |
| dc.date.issued | 2002 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/5985 | |
| dc.source.beginpage | 273 | |
| dc.source.conference | Advanced Metallization Conference 2001 | |
| dc.source.conferencedate | 9/10/2001 | |
| dc.source.conferencelocation | Montreal Canada | |
| dc.source.endpage | 278 | |
| dc.title | Properties of mesoporous low-k MSSQ based film prepared using macromolecular porogen | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
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