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Browsing by Author "Yu, Kai-Hung"

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    Publication

    Ruthenium recess for buried power rail integration

    Gupta, Anshul  
    ;
    Grzeskowiak, Jodi
    ;
    Jourdan, Nicolas  
    ;
    Yu, Kai-Hung
    ;
    Joy, Nicolas
    ;
    Kundu, Shreya  
    Meeting abstract
    2019, IITC-MAM 2019, 3/06/2019, p.4.08

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