Publication:

Ruthenium recess for buried power rail integration

Date

2019

Meeting abstract

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Author(s)

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Grzeskowiak, Jodi

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Jourdan, Nicolas

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Boemmels, Juergen

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Adelmann, Christoph

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Jamieson, Geraldine

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Raley, Angelique

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deVilliers, Anton

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Biesemans, Serge

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Statistics

1998 since deposited on 2021-10-27

Acq. date: 2026-02-24