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Browsing by Author "Zakel, Julia"

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    Hybrid SIMS: New possibilities for advanced semiconductor structure analysis with self-focusing SIM

    Kayser, Sven
    ;
    Pirkl, Alexander
    ;
    Zakel, Julia
    ;
    Franquet, Alexis  
    ;
    Spampinato, Valentina  
    Proceedings paper
    2019, Festkörperanalytik - Conference on Solid State Analysis, 1/07/2019
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    Hybrid SIMS: New possibilities for advanced semiconductor structure analysis with Self-Focusing SIMS

    Kayser, Sven
    ;
    Pirkl, Alexander
    ;
    Zakel, Julia
    ;
    Franquet, Alexis  
    ;
    Spampinato, Valentina  
    Proceedings paper
    2019, ECASIA (European Conference on Applications for Surface and Interface Analysis), 15/09/2019
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    New possibilities for advanced semiconductor structure analysis by combining SIMS with SPM and high performance mass spectrometry

    Kayser, Sven
    ;
    Pirkl, Alexander
    ;
    Zakel, Julia
    ;
    Franquet, Alexis  
    ;
    Spampinato, Valentina  
    Oral presentation
    2020, Microscopy & Microanalysis 2020 Meeting

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