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Hybrid SIMS: New possibilities for advanced semiconductor structure analysis with Self-Focusing SIMS
Publication:
Hybrid SIMS: New possibilities for advanced semiconductor structure analysis with Self-Focusing SIMS
Date
2019
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Kayser, Sven
;
Pirkl, Alexander
;
Zakel, Julia
;
Franquet, Alexis
;
Spampinato, Valentina
Journal
Abstract
Description
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2120
since deposited on 2021-10-27
Acq. date: 2025-10-27
Citations
Metrics
Views
2120
since deposited on 2021-10-27
Acq. date: 2025-10-27
Citations