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Hybrid SIMS: New possibilities for advanced semiconductor structure analysis with Self-Focusing SIMS
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Hybrid SIMS: New possibilities for advanced semiconductor structure analysis with Self-Focusing SIMS
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Date
2019
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Kayser, Sven
;
Pirkl, Alexander
;
Zakel, Julia
;
Franquet, Alexis
;
Spampinato, Valentina
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Abstract
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2125
since deposited on 2021-10-27
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Acq. date: 2025-12-12
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Metrics
Views
2125
since deposited on 2021-10-27
3
last month
Acq. date: 2025-12-12
Citations