Browsing by Author "Zauner, Andy"
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Publication ALD of ZrO2, TiO2 and ZrTiO4 thin films from heteroleptic precursors
Oral presentation2010, 10th International Conference on Atomic Layer Deposition - ALDPublication ALD of ZrO2, TiO2 and ZrTiO4 thin films from novel heteroleptic precursors
Oral presentation2008, Workshop GerALD