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Browsing by Author "Zeng, Xuefeng"

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    OPC and Modeling Solution to Support 0.55NA EUV Stitching

    Zeng, Qinglin
    ;
    Xu, Dongbo
    ;
    Zeng, Xuefeng
    ;
    Gillijns, Werner  
    ;
    Tejnil, Edita
    ;
    Sun, Yuyang
    Proceedings paper
    2024, 2024 International Conference on Extreme Ultraviolet Lithography, SEP 30-OCT 03, 2024, p.Art. 1321507

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