Browsing by Author "Zhang, Can"

Carbon nanotube growth for high aspect ratio interconnect applications

Carbon nanotube growth for through-silicon via applications

Complementary metal-oxide-semiconductor-compatible and self-aligned catalyst formation for carbon nanotube synthesis and interconnect fabrication

Growth of carbon nanotubes as horizontal interconnects

Growth of vertically-aligned carbon nanotube forests on conductive cobalt disilicide support

High-density growth of horizontally aligned carbon nanotubes for interconnects

Increased carbon nanotube density after catalyst generation from cobalt disilicide using a cyclic reactive ion etching approach