Complementary metal-oxide-semiconductor-compatible and self-aligned catalyst formation for carbon nanotube synthesis and interconnect fabrication

Zhang, Can; Feng, Yan; Bayer, Bernhard; Blume, Raoul; van der Veen, Marleen; Xie, Rongsi; Zhong, Guofang; Chen, Bingan; Knop-Gericke, Axel; Schlögl, Robert; Capraro, Bernard; Hofmann, Stephan; Robertson, john

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Complementary metal-oxide-semiconductor-compatible and self-aligned catalyst formation for carbon nanotube synthesis and interconnect fabrication

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2012

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van der Veen, Marleen

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Journal of Applied Physics

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Complementary metal-oxide-semiconductor-compatible and self-aligned catalyst formation for carbon nanotube synthesis and interconnect fabrication

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