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Browsing by Author "Zhang, Pengcheng"

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    Study of design-based e-beam defect inspection for hotspot detection and process window characterization on 10nm logic device

    Halder, Sandip  
    ;
    Leray, Philippe  
    ;
    Di Lorenzo, Paolo
    ;
    Wang, Fei
    ;
    Zhang, Pengcheng
    ;
    Fang, Wei
    Proceedings paper
    2016, Metrology, Inspection, and Process Control for Microlithography XXX, 20/02/2016, p.97780O

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