Browsing by Author "Zhang, Yide"
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Publication Carbon nanotube EUV pellicle tunability and performance in a scanner-like environment
Journal article2021, JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3, (20) 3, p.031010Publication CNT EUV pellicle tunability and performance in a scanner-like environment
Proceedings paper2021, Conference on Extreme Ultraviolet (EUV) Lithography XII, FEB 22-26, 2021, p.116090Y