CNT EUV pellicle tunability and performance in a scanner-like environment

Simple item page Full metadata Statistics

Author(s)

Timmermans, Marina

;

Pollentier, Ivan

;

;

Nuytten, Thomas

;

Sergeant, Stefanie

;

Conard, Thierry

;

Meersschaut, Johan

;

;

Dialameh, Masoud

;

Alaerts, Wilfried

;

;

Spampinato, Valentina

;

Franquet, Alexis

;

;

Huyghebaert, Cedric

;

Gallagher, Emily

Journal

Proceedings of SPIE

Metrics

1502 since deposited on 2021-11-02

Acq. date: 2025-10-26