Publication:

CNT EUV pellicle tunability and performance in a scanner-like environment

Date

2021
Proceedings Paper
https://doi.org/10.1117/12.2584519
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dc.contributor.authorTimmermans, Marina
dc.contributor.authorPollentier, Ivan
dc.contributor.authorKorytov, Maxim
dc.contributor.authorNuytten, Thomas
dc.contributor.authorSergeant, Stefanie
dc.contributor.authorConard, Thierry
dc.contributor.authorMeersschaut, Johan
dc.contributor.authorZhang, Yide
dc.contributor.authorDialameh, Masoud
dc.contributor.authorAlaerts, Wilfried
dc.contributor.authorJazaeri, Ehsan
dc.contributor.authorSpampinato, Valentina
dc.contributor.authorFranquet, Alexis
dc.contributor.authorBrems, Steven
dc.contributor.authorHuyghebaert, Cedric
dc.contributor.authorGallagher, Emily
dc.contributor.imecauthorTimmermans, Marina
dc.contributor.imecauthorPollentier, Ivan
dc.contributor.imecauthorKorytov, Maxim
dc.contributor.imecauthorNuytten, Thomas
dc.contributor.imecauthorSergeant, Stefanie
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorMeersschaut, Johan
dc.contributor.imecauthorZhang, Yide
dc.contributor.imecauthorDialameh, Masoud
dc.contributor.imecauthorAlaerts, Wilfried
dc.contributor.imecauthorJazaeri, Ehsan
dc.contributor.imecauthorSpampinato, Valentina
dc.contributor.imecauthorFranquet, Alexis
dc.contributor.imecauthorBrems, Steven
dc.contributor.imecauthorHuyghebaert, Cedric
dc.contributor.imecauthorGallagher, Emily
dc.contributor.orcidimecZhang, Yide::0000-0002-2675-739X
dc.contributor.orcidimecPollentier, Ivan::0000-0002-4266-6500
dc.contributor.orcidimecNuytten, Thomas::0000-0002-5921-6928
dc.contributor.orcidimecSergeant, Stefanie::0000-0001-9923-0903
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecMeersschaut, Johan::0000-0003-2467-1784
dc.contributor.orcidimecDialameh, Masoud::0000-0002-1439-590X
dc.contributor.orcidimecSpampinato, Valentina::0000-0003-3225-6740
dc.contributor.orcidimecFranquet, Alexis::0000-0002-7371-8852
dc.contributor.orcidimecBrems, Steven::0000-0002-0282-8528
dc.contributor.orcidimecHuyghebaert, Cedric::0000-0001-6043-7130
dc.contributor.orcidimecTimmermans, Marina::0000-0001-9805-8259
dc.contributor.orcidimecGallagher, Emily::0000-0002-2927-8298
dc.date.accessioned2023-01-19T09:47:16Z
dc.date.available2021-11-02T15:58:24Z
dc.date.available2023-01-19T09:47:16Z
dc.date.issued2021
dc.identifier.doi10.1117/12.2584519
dc.identifier.eisbn978-1-5106-4052-8
dc.identifier.isbn978-1-5106-4051-1
dc.identifier.issn0277-786X
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/37680
dc.publisherSPIE-INT SOC OPTICAL ENGINEERING
dc.source.beginpage116090Y
dc.source.conferenceConference on Extreme Ultraviolet (EUV) Lithography XII
dc.source.conferencedateFEB 22-26, 2021
dc.source.conferencelocationVirtual
dc.source.journalProceedings of SPIE
dc.source.numberofpages21
dc.source.volume11609
dc.subject.keywordsCARBON NANOTUBES
dc.subject.keywordsELECTRON-BEAM
dc.subject.keywordsRAMAN-SPECTROSCOPY
dc.subject.keywordsPURIFICATION
dc.subject.keywordsHYDROGENATION
dc.title

CNT EUV pellicle tunability and performance in a scanner-like environment

dc.typeProceedings paper
dspace.entity.typePublication
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