Browsing by Author "Zhang, Zhe"
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Publication Nondestructive, high-resolution, chemically specific 3D nanostructure characterization using phase-sensitive EUV imaging reflectometry
;Tanksalvala, Michael ;Porter, Christina L. ;Esashi, Yuka ;Wang, BinJenkins, Nicholas W.Journal article2021-01-27, SCIENCE ADVANCES, (7) 5, p.eabd9667