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Nondestructive, high-resolution, chemically specific 3D nanostructure characterization using phase-sensitive EUV imaging reflectometry
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Acq. date: 2026-04-07
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494 since deposited on 2021-11-02
42last month
13last week
Acq. date: 2026-04-07
Views
1681 since deposited on 2021-11-02
Acq. date: 2026-04-07
Citations