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Nondestructive, high-resolution, chemically specific 3D nanostructure characterization using phase-sensitive EUV imaging reflectometry
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Acq. date: 2026-04-27
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519 since deposited on 2021-11-02
43last month
7last week
Acq. date: 2026-04-27
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1681 since deposited on 2021-11-02
Acq. date: 2026-04-27
Citations