Publication:

Nondestructive, high-resolution, chemically specific 3D nanostructure characterization using phase-sensitive EUV imaging reflectometry

Date

2021-01-27
Journal article
https://doi.org/10.1126/sciadv.abd9667
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dc.contributor.authorTanksalvala, Michael
dc.contributor.authorPorter, Christina L.
dc.contributor.authorEsashi, Yuka
dc.contributor.authorWang, Bin
dc.contributor.authorJenkins, Nicholas W.
dc.contributor.authorZhang, Zhe
dc.contributor.authorMiley, Galen P.
dc.contributor.authorKnobloch, Joshua L.
dc.contributor.authorMcBennett, Brendan
dc.contributor.authorHoriguchi, Naoto
dc.contributor.authorYazdi, Sadegh
dc.contributor.authorZhou, Jihan
dc.contributor.authorJacobs, Matthew N.
dc.contributor.authorBevis, Charles S.
dc.contributor.authorKarl, Robert M., Jr.
dc.contributor.authorJohnsen, Peter
dc.contributor.authorRen, David
dc.contributor.authorWaller, Laura
dc.contributor.authorAdams, Daniel E.
dc.contributor.authorCousin, Seth L.
dc.contributor.imecauthorHoriguchi, Naoto
dc.contributor.orcidextPorter, Christina L.::0000-0002-4476-9749
dc.contributor.orcidextEsashi, Yuka::0000-0002-6749-5496
dc.contributor.orcidextJenkins, Nicholas W.::0000-0001-5725-0658
dc.contributor.orcidextKnobloch, Joshua L.::0000-0002-4086-3746
dc.contributor.orcidextBevis, Charles S.::0000-0002-8671-0681
dc.contributor.orcidimecHoriguchi, Naoto::0000-0001-5490-0416
dc.date.accessioned2022-04-25T10:13:23Z
dc.date.available2021-11-02T16:04:30Z
dc.date.available2022-04-08T12:26:10Z
dc.date.available2022-04-25T10:13:23Z
dc.date.issued2021-01-27
dc.identifier.doi10.1126/sciadv.abd9667
dc.identifier.issn2375-2548
dc.identifier.pmidMEDLINE:33571123
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/38142
dc.publisherAMER ASSOC ADVANCEMENT SCIENCE
dc.source.beginpageeabd9667
dc.source.issue5
dc.source.journalSCIENCE ADVANCES
dc.source.numberofpages11
dc.source.volume7
dc.subject.keywordsEUV imaging reflectometry
dc.title

Nondestructive, high-resolution, chemically specific 3D nanostructure characterization using phase-sensitive EUV imaging reflectometry

dc.typeJournal article
dspace.entity.typePublication
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