Browsing by Author "Zhao, Q. T."

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Strained silicon on wafer level by wafer bonding: materials processing, strain measurements and strain relaxation

Reiche, M.
;
Moutanabbir, O.
;
Himcinschi, C.
;
Christiansen, S.
;
Erfurth, E.
;
Goesele, U.
;
Mantl, S.
Proceedings paper
2008, Semiconductor Wafer Bonding 10: Science, Technology, and Applications, 12/10/2008, p.311-320
Strained silicon-on-insulator : fabrication and characterization

Reiche, M.
;
Himcinschi, C.
;
Goesele, U.
;
Christiansen, S.
;
Mantl, S.
;
Buca, D.
;
Zhao, Q. T.
;
Feste, S.
Proceedings paper
2007, Silicon-on-Insulator Technology and Devices 13, 6/05/2007, p.339-344