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Browsing by Author "Zharfan, F."

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    Publication

    Impact of Al-doping on Al:HfO2 dielectric reliability in MIM capacitors

    Fohn, Corinna  
    ;
    Zharfan, F.
    ;
    Chery, Emmanuel  
    ;
    Croes, Kristof  
    ;
    Stucchi, Michele  
    ;
    Afanasiev, Valeri  
    Proceedings paper
    2025, 2025 IEEE INTERNATIONAL RELIABILITY PHYSICS SYMPOSIUM, IRPS, 2024-03-25

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