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Impact of Al-doping on Al:HfO2 dielectric reliability in MIM capacitors
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Impact of Al-doping on Al:HfO2 dielectric reliability in MIM capacitors
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Date
2025-01-01
Proceedings Paper
https://doi.org/10.1109/IRPS48204.2025.10982827
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Fohn, Corinna
;
Zharfan, F.
;
Chery, Emmanuel
;
Croes, Kristof
;
Stucchi, Michele
;
Afanasiev, Valeri
Journal
2025 IEEE INTERNATIONAL RELIABILITY PHYSICS SYMPOSIUM, IRPS
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13
since deposited on 2025-11-27
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Acq. date: 2025-12-15
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Views
13
since deposited on 2025-11-27
3
last week
Acq. date: 2025-12-15
Citations